Kenny's group is researching fundamental issues and applications of micromechanical structures. These devices are usually fabricated from silicon wafers using integrated circuit fabrication tools. Using these techniques, the group builds sensitive accelerometers, infrared detectors, and force-sensing cantilevers. This research has many applications, including integrated packaging, inertial navigation, fundamental force measurements, experiments on bio-molecules, device cooling, bio-analytical instruments, and small robots. Because this research field is multidisciplinary in nature, work in this group is characterized by strong collaborations with other departments, as well as with local industry.
Last modified Mon, 2 Dec, 2013 at 13:15
|Encapsulated submillimeter piezoresistive accelerometers||Kenny, TW, et. al.||Journal of Microelectromechanical Systems||06-2006|
|Phase change phenomena in silicon microchannels||Kenny, TW, et. al.||International Journal of Heat and Mass Transfer||04-2005|
IEEE Technical Achievement Award (2011), Robert Bosch Faculty Scholar NSF CAREER Award (1995-1999) Terman Fellowship (1995-1998) Captain, Ultimate Frisbee Coed National Champions (RFBF), 1998 Captain, Ultimate Frisbee Coed World Champions (RFBF), 1999